WEG Wafer Edge Inspection Systems by NED

Example Images
Imaging Power
Other Edge Inspection Systems
NED Line Scan Camera
High resolution: 3.24µm/Pix
High speed: 26µ sec/Line < 1 minute for a 300mm wafer scanned twice (due to edge grip)
All areas of the image are in focus
Conventional Area Camera – 640 X 480 –
Note edges of image on all sides are out of focus.
Wafer Edge Defect Images
Crack
Crack
Chip
Scratch
Pit
Sample Images
Enlarged image of defect 40 shown at full resolution of line scan camera
1024 pixels per vertical line
Bottom of window shows defect location in degrees from the notch going in a clockwise direction.
Enlarged image of defect 32 shown at full resolution of line scan camera
Bottom of window shows defect location in degrees from the notch going in a clockwise direction.
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