Slip and Defect Detection System

• Nomarski (DIC) Optics with 20X to 200X Magnification
  
  
• Very Accurate Air Bearing Stages
  
  
• Automated Slip and Defect Detection
  
  
• Detects other Surface Defects such as Stacking Faults, Spikes, Pits, Particles
  
  
• Automatic Notch, Flat and Edge Finding built into Software
  
  
• 50-200mm Wafer Inspection (200mm Tool)
  
  
• 50-300mm Wafer Inspection (300mm Tool)
  
  
• Optional ADC (Automated Defect Classification)
  
  
• Adjustable Inspection and Slip/Defect Detection Recipes
  
  
• Windows NT or XP Environment
  
  
• Optional Cassette Loading System