Automated Microscope

Slip Line and Defect Detection
The Hologenix Automated Nomarski Microscope is useful for detecting Slip Dislocations and other Defects that occur during many types of Wafer Processes:
  • EPI
  • Oxidation, Diffusion
  • Post Implant Annealing, RTP
  • SOI
  • Polishing
  • Strained Silicon
  • Many other Semiconductor applications
Features:
  • 100-200mm and 300mm Versions
  • Automated Slip Line and Defect Detection
  • For Patterned and Un-Patterned Wafers
  • Manual Load (Optional Cassette Load)
  • Based on the Nomarski (DIC) Optics
  • Sophisticated Automatic Defect Detection Software
  • Customized Defect Detection Algorithms Available
  • Economical
Slip Line at Notch

Optics:

  • High Quality Microscope Optics
  • Typical Field of Views
    - 5mm X 5mm - For High Throughput
    - 1mm X 1mm
    - Smaller FOV's For High Accuracy
  • DIC (Differential Interference Contrast) Mode
  • High Resolution CCD Video Camera
  • Options
    - Darkfield Imaging
    - Trinocular Head for Direct Image Viewing
    - Various Objectives and Other Microscope Options
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