Slip and Defect Detection Software

• Automated Detection of Slip
  Lines and other Defects
  
  
• Detect, Count, Locate and
  Measure Defects
  
  
• Windows NT or XP Interface
  
  
• Adjustable Sensitivity
  
  
• Adjustable Edge Exclusion
  
  
• Graphic Display of Wafer with
  Highlighted Defect Locations
  
  
• Wafer Accept/Reject Recipes
  
  
• Lotfile Reports, Image
  Archiving and Printing
  
  
• Automated, Semi-Automated
  and Engineering Mode

• All Defects are Reported in mm using Coordinates relative to the Center
  
  
• System Outputs Wafer Maps Showing Actual Orientation, Location and Size of
  Defects
  
  
• Comprehensive Defect Review
  
  
• System can be configured to stop the inspection after certain defect criteria are met to improve throughput
  
  
• Customized Defect Detection Algorithms Available
  
  
• Optional - Automatic Defect Classification