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PBS
1000 |
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Subsurface
Defect Measurement System |
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PBS®
and EPBS™ measurements with the VTI® PBS-1000 Fast-Mapper System |
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Non-destructive
low level backscatter measurements for detection of nanometer size microdefects
below the polished wafer surface |
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- Qualification of
polished and epitaxial substrate wafers
- Polishing and ion
implant damage easily quantified
- 100mm - 300mm unpatterned
wafers
- 0.001 ppm/Sr scattered
light detection level
- 3µm detection
depth in Silicon and 0.4µm in GaAs
- High resolution
mapping of defect levels and distribution in epitaxial layers with >450,000
points with 2
- measurements per
point for Surface and Subsurface EPBS™
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VTI®
also offers THE HAZE MONITOR™ a new instrument designed to quickly
detect and quantify haze at very low levels. |
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MICRO
MAGAZINE ARTICLE |
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Back |
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