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Metrology |
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COREMA
by SemiMap
COntactless REsistivity
MApping Measurement System
High-resolution
measurements of semi-insulating GaAs, InP and SiC materials. |
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SemDex
by ISIS optronics
Contactless
Layer Inspection and Metrology Measurement
Contactless
spatial thickness and surface mapping of ultra-thin wafers, MEMS and
bumps. |
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Defect
Detection / Surface Inspection |
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SlipFinder
by Hologenix
Crystal Slip Detection
System
Fully-Automated
inspection system using advanced slip detection software |
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NGS-3500
by Hologenix
Microscope Defect Detection
System
Automated microscope detects Slip Dislocation and other defects occuring
during many wafer processes. |
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Wafer
Edge Inspector by NED
Wafer Edge Defect
Detection
Automated defect detection system using linescan machine vision. |
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Software |
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WAFERMAP
by BOIN
Analytical and Visualization
Software
Collect, edit, analyze and visualize measured physical parameters
on semiconductor wafers. |
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yieldWerx
Semiconductor
Data Analysis Software
yieldWerx provides users with a wide
variety of statistical analysis charts and reports, all integrated
with the yieldWerx database. |
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Other |
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Hypercure
by Hologenix
Ultra Violet Curing System,
Light Sources and Exposure Systems
State-of-the-art system cures material without heat but with strong
UV energy. |
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Lamps
Replacement Lamps
High Pressure Xenon, Mercury and Flash Lamps. |
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PBS®
and EPBS by VTI®
Surface
and Subsurface Defect Measurement Systems
Full wafer mapping and measurements of microdefects on and below (<
= 3µm) the wafer surface. |
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