PRODUCTS
Metrology
MX Series Gauges by E+H Metrology
Wafer Geometry and Resistivity Gauges
Compact table top tools and automated wafer sorters for thickness, warp, bow, and flatness.
COREMA™ by SemiMap
COntactless REsistivity MApping Measurement System
High-resolution measurements of semi-insulating GaAs, InP and SiC materials.

PhaseView®
3D High Precision Surface Metrology and Digital Wavefront Technology
High speed, high resolution, low cost, measurement technology for Solar Cells, Lasers, Optics, Ophthalmology, Semiconductor, and Industrial Applications
Defect Detection / Surface Inspection
Magic Mirror™ by Hologenix
Wafer Surface Inspection System
Full field wafer view defect detection system.
SlipFinder™ by Hologenix
Crystal Slip Detection System
Fully-Automated inspection system using advanced slip detection software
NGS-3500 by Hologenix
Microscope Defect Detection System
Automated microscope detects Slip Dislocation and other defects occuring during many wafer processes.
Wafer Edge Inspector by NED
Wafer Edge Defect Detection
Automated defect detection system using linescan machine vision.
Software
WAFERMAP by BOIN
Analytical and Visualization Software
Collect, edit, analyze and visualize measured physical parameters on semiconductor wafers.
yieldWerx
Semiconductor Data Analysis Software
yieldWerx provides users with a wide variety of statistical analysis charts and reports, all integrated with the yieldWerx database.
Other
Hypercure by Hologenix
Ultra Violet Curing System, Light Sources and Exposure Systems
State-of-the-art system cures material without heat but with strong UV energy.
Lamps
Replacement Lamps
High Pressure Xenon, Mercury and Flash Lamps.
. PBS® and EPBS™ by VTI®
Surface and Subsurface Defect Measurement Systems
Full wafer mapping and measurements of microdefects on and below (< = 3µm) the wafer surface.

Unibrite™
Next Generation LED Illumination
High Uniformity, High Efficiency, Energy Saving, Environmentally Friendly.Overcomes Limitations of LED Modules.