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SlipFinder
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Software |
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- Automated Detection
of Slip Lines
- Detect, Count,
Locate and Measure (Length)
- Windows Interface
- Adjustable Sensitivity
- Adjustable Edge
Exclusion
- Graphic Display
of Wafer with Highlighted Slip Locations
- Wafer Accept/Reject
Recipes
- Lotfile Reports,
Image Archiving and Printing
- Automated, Semi-Automated
and Engineering Mode
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- Inspection locations
are completely configurable via a layout/grid option
- All slip lines
are reported in mm using wafer coordinates
- System outputs
wafer maps showing actual orientation and length of slip lines
- Sections of slip
lines from different fields of view can be automatically combined and
Reported as one long slip line
- System can be configured
to stop the inspection upon the 1st failure to improve throughput
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| The
SlipFinder is useful for detecting dislocations that occur during many types
of wafer processes. |
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- Epitaxy
- Oxidation, Diffusion
- Post Implant Annealing, RTP
- SOI
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| Back |
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