SlipFinder
Automated SlipFinder Systems

200mm Two Cassette
300mm Dual FOUP
The SlipFinder is a wafer surface inspection system for the detection of crystal slip dislocation. The system's high optical sensitivity eliminates the subjective and tedious visual and microscope inspection methods. It provides rapid "hands-off" slip inspection for in-line monitoring and production.
200mm SlipFinder YIS-200HM 300mm SlipFinder YIS-300HM
  • Fully Automated Slip Detection
  • Sub-micron Detection Sensitivity
  • Optical Field of View 15mm X 11mm
  • Non-contact Notch, Flat-Finding and Centering
  • Technology
  • 150-200 mm Wafer Inspection
  • Approx. 60 Wafers per Hour
  • Dual Cassette & Dual Robots
  • SECS II - GEM
  • Adjustable Inspection and Slip Detection Recipes
  • Class 1 Clean Room Compatible
  • Windows NT Environment
  • Fully Automated Slip Detection
  • Full or Partial Wafer Inspection
  • Adjustable Inspection and Slip Detection Recipes
  • Sub-micron Detection Sensitivity
  • Optical Field of View 15mm X 11mm
  • Up to 60 wafers per hour
  • Dual FOUPs & Dual Robots
  • Optical Non-Contact Notch Finding
  • Class M1 Mini-Environment
  • Windows NT
  • SECSII-GEM via RS232 or HSMS
  • Full Factory Automation
  • S2 Third Party Report
  • Sorter Capabilities - Optional OCR
Features
  • Adjustable Inspection and Slip Detection Recipes
  • SECS II - GEM
Back