PBS® and EPBS™ by VTI
Surface and Subsurface Defect Measurement Systems
Brochure - PBS-1000 - Subsurface Defect Measurement System

Specifications - PBS-1000 - Subsurface Defect Measurement System

Examples - PBS™ Measurements

Article - Micro Magazine Article

Applications:
NEW: Application Note - PBS Measurements and CMP (300 KB)

NEW: Paper - Photon Back-Scatter Analysis of SOI Wafers (1250 KB)
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