With a throughput of 300 wafers per hour for 200mm wafers, the YIS-200SP-4 equipped with rotating tilt stages (RTS) offers an unsurpassed inspection sensitivity for polished and epitaxial wafers.

The proprietary Magic Mirror™ optics inspects the entire wafer surface in real-time and can detect extremely shallow defects in the wafer surface. The Magic Mirror™ offers a vital capability for the qualification of materials and processes used in advanced IC manufacturing where ultra-flat and defect-free wafer surfaces are required.

Applications include the inspection of thermal steps - epitaxy, diffusion and RTP, as well as wafer polishing and CMP. The Magic Mirror™ is an inspection tool that cost effectively provides process characterization information during development and timely troubleshooting during production.

The Hologenix Magic Mirror™ surface inspection systems are available in several different configurations ranging from a simple manual tool to a fully-automated Windows NT based, SECS II GEM compliant, dual cassette, 300mm system.

• Defect types include: dimples, mounds, edge dimples, flares and other flaws
• Detects, classifies and counts defects
• Visual, printed and file based reporting
  
• Windows NT based
• Controls high performance Matrox DSP image processor
• Integrated with system and automation control software
• Automatic printing and saving of images
• Storage and retrieval of defect detection recipes
• User friendly with integrated help system
• Optional SECS II- GEM capability