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| Magic
Mirror™ |
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| 300MM
2 Cassette Automated Wafer Surface Inspection System |
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| YIS-300SP-2 |
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- 200mm and/or
300mm compatible; 13 or 25 capacity
- FOUP or
open cassette
- Class 0.1
mini-environment
- OCR camera
- Ion flow
bar for ESD protection
- Non-contact
notch finder
- Edge-grip
wafer handling; Easy-to-use touchscreen operation
- Signal tower
- 150 wafers
per hour
- SECSII/GEM
integration
- Mini-environment
monitoring/regulating system; Wafer-shipper FOUP compatibility
- Carrier ID-tag
integration
- Fully automated
system integrated under Windows NT 4.0 software
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