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Wafer Geometry (thickness, TTV, flatness, bow, warp), Stress, Resistivity, and Type Measurement Gauges & Sorters

	MX203-8-37 Thickness, TTV, Flatness, Bow/Warp, Stress Wafer Sizes: 150 & 200mm Wafer Thickness: 300 - 900um Bow/Warp: 300um
	MX2012-H Thickness, TTV, Flatness, Bow/Warp, Stress Wafer Size: 300mm Wafer Thickness: 500 - 900um Bow/Warp: 1000um
	MX6012 Resistivity, Thickness, TTV, PN Type Wafer Sizes: 200 & 300mm Wafer Thickness: 600 - 900um Resistivity: 0.001 - 100 Wcm
	MX202 Hi-throughput belt sorter Thickness, TTV, Bow/Warp, Resistivity, P/N Type Wafer Sizes: 150mm - 200mm >500wph (200mm) >700wpm (150mm)
	MX1018 Hi-Resolution Thickness, TTV, & Flatness Wafer Sizes: 300 & 450mm Wafer Thickness: 450 - 950um
	MX203-6-41-q Solar Gauge Thickness, TTV, Flatness, Bow/Warp Wafer Sizes: 100²mm ,125²mm, & 156² mm Thickness: 160 - 700um
	MX604-ST Solar Gauge Thickness & Resistivity Wafer Sizes: 100²mm ,125²mm, & 156² mm

MX6012-DRAT-8C 300mm Wafer Sorter

E+H Metrology GmbH has been supplying the semiconductor and solar industries with non-contact capacitive metrology and resistivity gauges and sorters for over 25 years. From wafer manufacturers to fabs, front-end or back-end, as-sawn or backgrind, E+H has the solution for your metrology needs. On this page is just a small sampling of the over 36 different gauges and sorters available from E+H. If you don't see your solution, please contact Hologenix to discuss your specific requirements or visit E+H Metrology GmbH.