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Layer Thickness, Planarity, Bumps, TSV, MEMS, and Roughness Measurements.

	SemDex 101 Compact tabletop manual loading system ideal for off-line process monitoring for 50mm to 100mm substrates.
	SemDex 301 Manual loading, automated in-line process monitoring system for 150mm, 200mm & 300mm substrates.

Contactless, fast and precise process control. Based on patented Spectral Coherence Interferometry technology (SCI).

3D Topography of Square Minibumps

For more information visit ISIS Sentronics GmbH.