Metrology

Wafer Geometry (thickness/ flatness/ bow/ warp), Resistivity, Stress and Type Measurements

Resistivity Mapping for Semi-Insulating SiC, GaAs, InP & GaN

Thin Film Thickness, Planarity, Bumps, TSV, MEMS, and Roughness Measurements

Defect Detection/Inspection

Crystal Slip Defect Detection (SlipFinder)

Defect Detection on Ultra-Flat Wafers (Magic Mirror)

Automated Microscope Defect Detection System

Subsurface - Surface Defect Detection and Characterization

Software

Visualization and Analysis Software

Yield and Test Analysis Software

Solar Simulators & Test Systems

UV Curing, UV Exposure, Lamps

UV Curing System

UV Exposure Systems

UV Lamps

Kondo Kogei