Untitled Document

Applications: (Substrate-) Layers



		2D distribution of substrate layer thicknesses from a silicon wafer 2D substrate layer distribution from a 200 mm silicon wafer. The false colors exhibit the local deviations from the mean substrate thickness of 326 µm. Acquired by the complete system SemDex 301.


	Statistic Layer 1 Average: 6.857 µm Maximum: 7.82 µm Minimum: 6.25 µm TTV: 1.57 µm		1D layer profile from a SOI wafer 1D layer profile from a 100 mm SOI wafer. Acquired by the complete system SemDex 101.


			2D distribution of substrate layer thicknesses from a CdTe wafer 2D substrate layer distribution from a 100 mm CdTe wafer as 3D plot. The false colors exhibit the local deviations from the mean substrate thickness of 857 ìm. Acquired by the complete system SemDex 101.