WAFERMAP Analytical and Visualization Software by Boin Scientific Software - collect, edit, analyze and visualize measured physical parameters on semiconductor wafers.

Hologenix is the exclusive distributor of WAFERMAP in the United States and Canada

WAFERMAP is a scientific software application that allows the user to collect, edit, analyze and visualize measured physical parameters on semiconductor wafers. It allows for data editing and interpolation according to ANY user-defined site distribution. One of its' strong features is its' ability to import data from various metrology tools such as thickness gauges, ellipsometers and four point probes. Several kinds of operations can be applied to the wafer maps or plots such as rotations, shifting of the grid in the X or Y direction, mirroring or reflecting of the data along the X or Y axis or averaging of radial zones. Global operations on the complete set of data such as adding, subtracting or multiplying by a constant can also be completed. WAFERMAP also allows the user to compare different sets of data by adding, subtracting or dividing complete wafer maps. A subtraction of the wafer maps taken before and after a wafer processing operation can provide valuable insight into the processing results. Maps can be printed and can also be exported to other file formats for use with other applications. Applications include map generation for manually operated metrology tools (e.g. older ellipsometers) and standardized visualization for different automatic metrology equipment (e.g. different type of 4 point probes in the same fab). WAFERMAP is the number one choice for paperless fabs!

Features

• General
• - Configurable 1D- (line scan), 2D- (contour or colored), and value plots
  - Configurable 3D- (solid or wire frame), 3D bar chart, and sigma range plots
  - Statistical analysis (histogram, calculation of mean, standard deviation, max, min, etc.)
  - Imp- Configurable 1D- (line scan), 2D- (contour or colored), and value plots
  - Configurable 3D- (solid or wire frame), 3D bar chart, and sigma range plots
  - Statistical analysis (histogram, calculation of mean, standard deviation, max, min, etc.)
• - Definition of any site pattern using a graphic editor
  - Automatic generation of circular or Cartesian site patterns for any test diameter
  - Extensive on-line help and HTML based user manual
• Import
  - Import functions for data from metrology tools:
• 4 Dimensions,
• AMS SRD/MRD,
• CDE ResMap,
• FILMetrics,
• KLA Tencor RS 100,
• KLA Tencor F5 Ellipsometer,
• NanoPhotonics,
• Napson WS300,
• Nicolet,
• Plasmos,
• Prometrix Rs,
• Prometrix UV-1250,
• QC Solutions,
• Rigaku,
• Rudolph,
• Rudolph Metapulse,
• SOPRA SE,
• Semitek,
• Thermawave Optiprobe and Thermaprobe,
• TWIN
  
• - Import of data from metrology tools which directly write WAFERMAP format:
• E+H,
• Foothill,
• Hypernex,
• ISIS Optronics,
• Jenoptik,
• Jobin Yvon,
• Sigmatech,
• Tepla)
  
• - Other import functions (e.g. ASCII files, OPUS)
  
• SPC
• - Trend charts
  - Trend lists
  - Global Statistics ("All points, all wafers")
  - Browser
  - Trend charts and lists can be sorted by any criterion (date & time, mean, max, min, std.dev. etc.)
  - Calculation of Stacked Maps
  - Direct import of measurement files into the SPC tool
• Operations
• - Global operations (add, subtract, divide, square, square root, etc.)
  - 1st and 2nd derivative of a map
  - File compare operations (add, multiply, ratio, average etc.)
  - File operations are applicable to files with different site distributions
  - Shift (X and Y direction) and rotation of grids
  - Mirroring of maps along the X and Y axis
  - Averaging of radial zones
  - Multiple files can be open simultaneously
  - Multiple views of a single file can be selected and displayed simultaneously
  - Multiple views can be printed on a single sheet, printouts are configurable including company logo
  - Transformation of grids (Cartesian, circular) keeping same measurement feature
  - Merge data of different files (e.g. two measurements of one wafer)
  - Sigma Sorting Filter (1, 2, 3 sigma)
  - Interpolation of sites
• Communication/ Linking
• - Inter-application communication via DCOM (ActiveX server)
  - Advanced control of WAFERMAP can be achieved via DDE linking to another applicationof WAFERMAP can be achieved via DDE linking to another application

WAFERMAP is the premiere product within the semiconductor industry for metrology data analysis. The features in the current version of WAFERMAP are the result of extensive feedback from existing and potential users. This feedback came from process engineers and scientists working at equipment, wafer and IC manufacturers. The latest software development technology is used during the development of WAFERMAP. The modular design of the software allows the Boin developers to easily add new features and support for new metrology tools. Boin's close contact with engineers in fabs and research labs allows for new developments to be continuously discussed. We invite you to take part in this process. Contact us, if you have any suggestions on how to improve WAFERMAP.

Evaluation Copy

WAFERMAP - Evaluation Version is a single user version of WAFERMAP. It is designed so new users can test the software and become familiar with its' features. You can try this program for 30 days free of charge.

Click here to download the Evaluation Version of WAFERMAP:

How to install: After downloading "wafer**.exe" into a separate directory, e.g. "C:/TEMP/", execute it. The WAFERMAP setup program will be started automatically and will lead you through the setup procedure. You must have administrative permissions on your PC in order to install WAFERMAP. If you have a previous version of WAFERMAP, you should uninstall the old version including all of its components before installing the new version.

If you have problems downloading the Evaluation version of WAFERMAP, please send us an E-mail requesting an Evaluation Copy. We will send you the software on a CD-ROM. Attention: Please send your complete address including the name of your company along with your telephone number. We can not process requests without this information. Thank you!

Screen Shots

• Overview
• 1D Plot
• 2D Contour Plot
• 2D Plot
• 3D Plot
• 3D Plot Options
• Histogram
• Compare
• Operations
• Browser
• Editor
• Create new map

Click here to see the WAFERMAP Revision History

"Click here to download the software from the Boin web site"

Go to the Boin web site for additional information about WAFERMAP and other Boin products