Metrology
Specialty LED lighting
Wafer Geometry(thickness/ flatness/ bow/ warp), Resistivity, Stress and Type Measurements
Products
Resistivity Mapping for Semi-Insulating SiC, GaAs, InP & GaN
ISIS Semdex
UV Curing, Exposure, Lamps
UV Curing Systems
Defect Detection/Inspection
UV Exposure systems
Crystal Slip Defect Detection
Defect Detection on Ultra-Flat Wafers
Microscope Defect Detection System
Subsurface - Surface defect detection and characterization
Solar Simulators
Software
Visualization and Analysis Software
Yield and Test Analysis Software