Wafer Geometry (thickness/ flatness/ bow/ warp), Resistivity, Stress and Type Measurements
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Metrology
Automated Microscope for CD, Overlay, and Defect Detection System
Automatic Defect Detection & Classification Automated Die Inspection
SEMI-INSULATING RESISTIVITY MEASUREMENTS
Resistivity Measurements for Semi-Insulating SiC, GaAs, InP & GaN