Defect Detection/Inspection

Defect Detection on Ultra-Flat Wafers (Magic Mirror™)

Magic Mirror

The Hologenix Magic Mirror Inspection Method

Crystal Slip Defect Detection (SlipFinder)

Slip Finder

The Hologenix SlipFinder for Crystal Slip Detection

Automated Microscope for CD, Overlay, and Defect Detection System

Automated Microscope Defect Detection System

Automatic Defect Detection & Classification
Automated Die Inspection

Wafer Edge Inspection

Wafer Edge Inspection

Hologenix 200mm and 300mm Automated Edge Defect Detection